Table 6.1, p.106, Global Nonelectrical (Industrial) Machinery, 1913-2007 [PDF]. Charts start on page 399 (24th page out of 26).
Tables 8.1 - 8.8, p.154-159, Global Greenhouse Gas Emissions by Category of Source, IPCC Sources (Google public spreadsheet)
Table 9.1, p.177, Oil Use by Category and Dollar Value, (Google public spreadsheet), and Oil Use by Category and Volume, from Charles Komanoff, Ending the Oil Age [PDF], p.8.
Table 10.1, p.202,The Distribution of Electricity Demand in the United States in Residential, Commercial, and Industrial Sectors (Google public spreadsheet).